Course
code EC530
credit_hours 3
title Micro-Electromechanical Systems (MEMS)
arbic title
prequisites EC434
credit hours 3
Describtion/Outcomes MEMS technology, revolution and advantages of MEMS technology. Description of the MEMS applications, and its fabrication techniques. Also Studying the nature of the piezoelectricity and piezoresistivity. Description of the microsensors, microactuators, different system issues and the scaling effect. Finally describing the Microassembly and an overview on Microrobotics.
arabic Describtion/Outcomes
objectives Description of MEMS, advantages, technology, and applications MEMs fabrication techniques.rnNature of the piezoelectricity and piezoresistivity.rnIdentification of the micro-sensors, micro-actuators.rnThe scaling effects.rnKnowledge and understanding of the micro-assembly.rnGaining an experience of the micro-robotics.rnDescribe the microsensors and microactuators. rnDescribe different system issues and the scaling effect.rnDescribe the Microassembly and an overview on Microrobotics.
arabic objectives
ref. books
arabic ref. books
textbook Introduction to Microelectromechanical (MEM) Microwave Systems, H. De Los Santos, Artech House, 1999.
arabic textbook
objective set
content set
Course Content
content serial describtion
1 MEMS technology, revolution and advantages
2 MEMS applications
3 MEMs fabrication techniques
4 Nature of the piezoelectricity and piezoresistivity and their applications in the microsensors
5 The MEMS inductor and capacitors
6 Identification of the micro-sensors
7 micro-actuators
8 The scaling effects
9 The micro-assembly
10 Micro-robotics
11 Micro-robotics
12 Micro-robotics
13 Reconfigurable elements (architecture)
14 Reconfigurable elements (programming)
15 Reconfigurable elements(testing and verification)
16 Final Exam